著者

明田川 正人 高田 孝次 野呂 昌良 小林 慶子 山田 和敏 竹島 信人 李 鍾斗 中山 義則

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.65, no.1, pp.121-125, 1999-01-05

被引用文献数

1 2

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This paper describes a suppression of the thermal drift error and an extension of a measurement range to micrometers in the comparative length measurement using a regular crystalline lattice as a reference scale and a dual tunneling unit scanning microscope (DTU-STM) as a detector. A thermo-stabilized cell, in which the DTU-STM can be set, was developed to reduce the temperature fluctuation to less than 0.05 K. In order to assess the thermo-stabilized cell, direct length comparison between the certified scanning electron microscope (SEM) standard grating with a average pitch of 240 nm and highly oriented pyrolytic graphite (HOPG) Iattice spacing, which is 0.246 nm, was performed using the DTU-STM, whose main body is made from Super-Invar. Images of the grating and the HOPG were simultaneously obtained in the range of 1um. To shorten the measurement time and thus reduce the thermal drift error, the lengths of I um for the two samples were measured along the fast scanning axis. A new ultra-low thermally drifted DTU-STM, whose body is fabricated from ultra-low linear expansion glass, was also developed to extend a measurement range to micrometers in the comparative length measurement. Long atomic image of HOPG crystal over a 5-um-long region along the fast scanning axis was obtained using the new DTU-STM in the thermo-stabilized cell. The experimental results show the possibility of the comparative length measurement in micrometers range with sub-nanometer resolution using the HOPG crystal and the DTU-STMs.