著者

片岡 俊彦 遠藤 勝義 井上 晴行 稲垣 耕司 森 勇藏 広瀬 喜久治 高田 和政

出版者

公益社団法人精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.60, no.8, pp.1122-1126, 1994

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The probe of this scanning near-field optical microscope (SNOM) is a dielectric sphere of 500 nm in diameter on a transparent substrate. The probe sphere is illuminated by evanescent wave which is formed by the incidence of He-Ne laser with the wave length of 632.8 nm from the inside of the substrate on the condition of total reflection. The light from the probe is collected by a conventional microscope through the substrate. The detected light intensity changes remarkably when a sample is brought in a near-field around the probe. The variation of detected light intensity in the near-field depends on refractive index of sample; the smaller real part of refractive index of sample, the more remarkable increase of detected light intensity. This result is explained by using an electric dipole model for the electromagnetic interaction between probe and sample. The vertical resolution of about 1 nm and lateral resolution of less than 20 nm are obtained for the developed microscope by measuring a standard specimen which is prepared by vacuum evaporation of metal.