著者

安河内 裕之 増原 慎 木原 信宏

出版者

一般社団法人日本機械学会

雑誌

マイクロ・ナノ工学シンポジウム

巻号頁・発行日

vol.2010, no.2, pp.157-158, 2010-10-12

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Targeting to manufacture of micro fluidic chip masters, the feasibility of the novel micro stereo lithography method which featured 'restrained resin surface by glass and one direction scanning' was studied. We have got better results by new method than by currently method. With the great help of such advantages, we succeeded in making two-depth sample whose minimum channel width was 50 μm at the height of 20 μm.