著者

上田 龍二

出版者

Japan Society of Corrosion Engineering

雑誌

防食技術 (ISSN:00109355)

巻号頁・発行日

vol.38, no.4, pp.231-237, 1989-04-15 (Released:2009-10-30)

参考文献数

10

被引用文献数

2 6

---

The photochemical machining of metals using a ferric chloride etchant is useful for producing micro machining parts and electronic parts such as printed circuit boards, shadow masks for CRT devices, IC lead frames etc. This paper presents the outlines of their examples of products, photo etching processes, photoresist materials for etch mask, machining accuracy, etchant composition, etching mechanism and characteristic phenomena.