著者

鳴海 圭亮 井柳 友宏 我妻 大策 廣田 雅彦 新井 史人

出版者

一般社団法人日本機械学会

雑誌

ロボティクス・メカトロニクス講演会講演概要集

巻号頁・発行日

vol.2008, pp."2P2-F14(1)"-"2P2-F14(3)", 2008-06-06

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Development of fabrication technology made it feasible to fabricate micro order structures. Those technologies include machining, MEMS (Micro Electro Mechanical System) and laser fabrication. In micro-world, assembly becomes especially a crucial problem. We have developed an easy and fast assembly process of microparts called STAMP (Stacked Microassembly Process). In this process, three-dimensional structural object is fabricated by stacking up two-dimensional layers and micro-structures are cut apart after all the assembly is completed. Here, as an example, we have fabricated a model of stag beetle. Two-dimensional layer parts are fabricated by SU-8 photolithography and electroplating. Stacked parts are bolted together using micro-rivets.