著者

紺野 能史 十合 晋一

出版者

一般社団法人 日本機械学会

雑誌

東北支部総会・講演会 講演論文集

巻号頁・発行日

vol.2000, pp.117-118, 2000

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This paper describes the mechanism of the generation of surface roughness in ultra-precision cutting using an air bearing spindie. Pure copper works were set up on an air bearing spindie and cutted by a diamond tool. The mirror finished surfaces of the works were measured along the cutting direction. Generally, the spindies supported by air bearings show small vibration with amplitude of nm-order. This vibration is peculiarity to the air bearings and is thought to be caused by pneumatic hammer and by air now in bearing clearances. The periodical distance and the amplitude of the roughness obtained from the measured surface profile are almost corresponds to those of the spindle vibration.