著者

増田 殊大 杉松 治美 小島 淳一 西田 祐也 巻 俊宏

出版者

一般社団法人 日本機械学会

雑誌

ロボティクス・メカトロニクス講演会講演概要集 2021 (ISSN:24243124)

巻号頁・発行日

pp.1A1-B03, 2021 (Released:2021-12-25)

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Most of the conventional hydrophones (underwater microphones) use PZT ceramic as the material, and there are problems such as variation in sensitivity, the necessity of high-magnitude amplification and high cost.We developed and evaluated a low-cost, easy-to-use MEMS hydrophone that is waterproof and pressure-resistant while maintaining the bandwidth of a commercially available MEMS microphone.