著者

熊谷 泰 嶋村 喜三郎 桑山 昇

出版者

一般社団法人日本機械学会

雑誌

年次大会講演論文集 : JSME annual meeting

巻号頁・発行日

no.1, pp.541-542, 2001-08-22

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Tribological coatings such as Cr-N, TiBN, Me-DLC(Me-C:H) were coated by Plasma Booster Sputtering(PBS) process using conventional balanced DC magnetron sputtering cathode in combination with additional DC plasma discharge between cathode and booster electrode. Seizure load and dynamic friction coefficient between coated steel substrate and steel(SCM415) was measured by pin and V-block type Faville tester. Also nano-hardness and Young's modulus was measured by nano-indenter using Berkovich diamond indenter.