著者
Murakami Katsuhisa Kadowaki Takuya Fujita Jun-ichi
出版者
American Institute of Physics
雑誌
Applied physics letters (ISSN:00036951)
巻号頁・発行日
vol.102, no.4, pp.043111, 2013-01
被引用文献数
29 2

From the analysis of the ratio of D peak intensity to G peak intensity in Raman spectroscopy, electron beam irradiation with energies of 100 eV was found to induce damage in single-layer graphene. The damage becomes larger with decreasing electron beam energy. Internal strain in graphene induced by damage under irradiation is further evaluated based on G peak shifts. The dose-dependent internal strain was approximately 2.22% cm2/mC at 100 eV and 2.65 × 10−2% cm2/mC at 500 eV. The strain induced by the irradiation showed strong dependence on electron energy.