- 著者
- Hiroki TANAKA Kiyoshi UCHIYAMA Takao SHIMIZU Hiroshi FUNAKUBO
- 出版者
- The Ceramic Society of Japan
- 雑誌
- Journal of the Ceramic Society of Japan (ISSN:18820743)
- 巻号頁・発行日
- vol.128, no.8, pp.436-440, 2020-08-01 (Released:2020-08-01)
- 参考文献数
- 24
- 被引用文献数
- 1 4
A SrZrO3 thin film with yttrium (Y) concentration of 20 at % (SZYO) was successfully deposited by the pulsed laser deposition (PLD) technique. The laser power of PLD affected Y-concentration significantly even though it used the same PLD target. On contrary, the laser reputation frequency and the deposition temperature did not significantly affect the composition. The SZYO film deposited at the optimized conditions was well crystallized and showed no secondary phase and showed (111) and (110) orientations when they were deposited on (111)Pt/SiOx/Si and on (111)Pd/(111)Pt/SiOx/Si substrates, respectively. This SZYO film is expected to use as an electrode of our proposed novel solid oxide fuel cells.