著者
Hojo H. Mase A.
出版者
American Institute of Physics
雑誌
Review of scientific instruments (ISSN:00346748)
巻号頁・発行日
vol.77, no.10, pp.10F329, 2006-10
被引用文献数
1 1

A new method for determining the electron density of a thin plasma by means of Fabry-Pérot interferometry is proposed. The interferometer consists of two plasma layers and dielectric material surrounded by two plasma layers. The transmittance of electromagnetic waves across the interferometer is calculated, and Fabry-Pérot resonances are demonstrated. It is shown that the electron density can be determined from the measurement of the Fabry-Pérot resonance frequencies. This method can also be applied to the measurement of conduction electron density in semiconductor films.