著者

黒河 明 北條 久男 小林 太吉

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.54, no.3, pp.196-198, 2011 (Released:2011-05-17)

参考文献数

7

被引用文献数

1

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The vibrating quartz oscillator in the viscous-flow gas was observed to compare the pressure (P) dependence between the impedance change (ΔZ) and the frequency change (ΔF). We obtained the ΔZ and the ΔF for Ar, O2, and Ne gases. Among Ar and O2 both the ΔZs and the ΔFs had no intersection with each other. However, Ne gas had the intersections with Ar gas with the ΔZ(P) and with O2 for the ΔF(P). The phenomenon was caused by the Ne property which Ne has smaller mass but larger viscosity compared with Ar and O2. The ΔZ-ΔF property showed that the property of each gas lied in the viscosity descending order, i.e., Ne, Ar, O2. The measurement of (ΔZ, ΔF) property could give the viscosity related information.