著者

木本 雄吾 宮崎 英治 石澤 淳一郎 島村 宏之

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.52, no.9, pp.475-483, 2009 (Released:2009-10-29)

参考文献数

50

被引用文献数

7 10

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The current issues of atomic oxygen (AO) effects on space materials in low earth orbit and its ground evaluation techniques are described briefly. AO is the dominant gas component at altitudes of 200-600 km. It has abundant energy to break hydrocarbon polymer bonds, thereby causing oxidation and thinning of the polymers through loss of volatile oxidation products. Therefore, ground evaluation of space materials is important. The AO source in Japan Aerospace Exploration Agency (JAXA) is based on laser breakdown phenomena. This source is one of the combined space effects test facility, which accommodates the irradiation of independent or coincidental electron beams, ultraviolet rays, and AO. Evaluation of common space materials has been done in addition to researches into new AO protective coatings and materials.   As described herein, the AO environment, its interactions with materials, results of space experiments, ground laboratory simulation techniques, and mitigation techniques are presented.

著者

中川 洋

出版者

一般社団法人 日本真空学会

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.3, no.3, pp.104-108, 1960

著者

松田 七美男

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.56, no.6, pp.199-203, 2013 (Released:2013-06-28)

参考文献数

7

被引用文献数

4

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To understand the property of gases, it is essential to consider them using kinetic theory of gases. This theory assumes that gas atoms/molecules are freely travelling and frequently changing their speed and direction by collisions each other. The purpose of the present article is to try to introduce the basic concepts of kinetic theory of gases to readers. We also show how it explains the fundamentals of vacuum science such as idealgas laws, origin of pressure, surface impinging rate and mean free path.

著者

株式会社東洋高圧 株式会社超臨界技術研究所

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.52, no.10, pp.566-569, 2009 (Released:2009-11-17)

参考文献数

4

著者

秋道 斉

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.56, no.6, pp.220-226, 2013 (Released:2013-06-28)

参考文献数

17

被引用文献数

1 8

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In this text, fundamentals of vacuum measurement are reviewed focused on the operation principles of common (both total and partial) pressure gauges. Total pressure gauges are classified into three categories. The first category includes e.g. U-tube, McLeod, diaphragm and bourdon gauges, which directly measure the actual “pressure” of gases. The second consists of Pirani, thermocouple, thermistor, spinning rotor and quartz gauges, which utilize the transport phenomena of rarefied gases. And the third comprises Penning, cold cathode magnetron, Bayard-Alpert and extractor gauges, which makes use of the ionization phenomena in gases. Partial pressure gages, also known as mass spectrometers, can also be classified into three categories which discriminate the mass of gas molecules 1) electrically, 2) electro-magnetically and 3) by time-of-flight, respectively. In this text, quadrupole mass spectrometer (category 1) and magnetic deflection mass spectrometer (category 2) are discussed in some detail.

著者

臼井 英之

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.51, no.8, pp.529-534, 2008 (Released:2008-09-11)

参考文献数

16

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In the present paper, we reviewed some linear and non-linear interactions which possibly occur when intense microwave beam emitted from Solar Power Satellite (SPS) propagates through the ionosphere down to the ground. In the linear regime, effects are discussed about the Faraday rotation, refraction, scintillation, and particle collision on the microwave beam propagation through the ionosphere. As to the non-linear interactions, three-wave coupling, self-focusing of microwave beam, and plasma perturbation by the Ponderomotive force are briefly reviewed. Since the theoretical analysis of these nonlinear phenomena is generally difficult, numerical simulations play an important role for the understanding of the interactions. In the present paper, we particularly focused on the three-wave coupling and the density perturbation by the Ponderomotive force by showing some simulation results obtained in computer experiments with plasma particle model.

著者

関口 敦

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.59, no.7, pp.171-183, 2016 (Released:2016-07-16)

参考文献数

24

被引用文献数

4 4

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本講座は化学気相成長(CVD)法の基礎に関して解説する.欠陥の少ない結晶成長や良好な被覆特性など,CVD 法を使用すると他の成膜方法では実現できない特長を得ることができる.実際にこの特長を得るためには,化学反応過程を解析し所定のプロセス条件で実施することが必要となる.本講座では CVD の定義から,この反応解析の手法と各プロセスの詳細に関して解説する.

著者

鹿毛 剛

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.58, no.9, pp.330-333, 2015 (Released:2015-09-29)

参考文献数

13

被引用文献数

1

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The unique properties of diamond like carbon (DLC) film, including its chemical inertness and impermeability, make it possible for new applications in food and beverage.   In this paper, I summarize and review the recent progress of gas barrier enhancement of polyethylene terephthalate (PET) bottles for beverage from the view point of the application of DLC coating.   A unique technique of plasma CVD method has been developed to deposit DLC layer on the inside surface of PET bottles. The DLC-coated PET bottle exhibits extremely high gas barrier properties against oxygen, carbon dioxide and flavors compared to conventional bottles.   For the practical use of PET bottles as a commodity, high speed and low cost coating are essential; accordingly several high speed coating machines with a capacity of up to 18000 bottles per hour have been developed, and successfully operated so far for a large production of soft drink. Low speed machines have also been introduced for wine, Japanese sake, edible oil, seasonings and others.

著者

南房 豊

出版者

一般社団法人 日本真空学会

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.9, no.1, pp.25-29, 1966-01-20 (Released:2009-09-29)

著者

岡本 幸雄

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.59, no.7, pp.161-170, 2016 (Released:2016-07-16)

参考文献数

11

被引用文献数

3

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プラズマを用いた微細加工や成膜などのプラズマプロセスにおけるプラズマの基礎的な事項(プラズマの性質と基礎量,プラズマ中の素過程,荷電粒子の消滅過程,イオンシースの形成と性質,主なプラズマの生成原理と基本的な特性および電子温度の制御法など)について解説した.

著者

内田 建

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.51, no.5, pp.301-305, 2008 (Released:2008-06-18)

参考文献数

13

被引用文献数

3 3

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Since the conventional strategy, namely scaling of device dimensions in ultimately scaled shorter-channel-length MOS transistors, is less effective to enhance transistor performance, another strategy is strongly demanded. Stress engineering is one of the most promising performance boosters for the ultimately scaled MOS transistors. In this paper, we will introduce the physical mechanisms of the drain current enhancement induced by stress. We will discuss the mechanisms based on the band structure modification by stress. The effectiveness of the stress engineering in future devices is also prospected.

著者

金原 粲

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.53, no.11, pp.696-698, 2010 (Released:2010-12-21)

著者

中野 武雄

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.57, no.8, pp.308-312, 2014 (Released:2014-08-25)

参考文献数

3

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Discharge plasma, especially that generated at low gas pressures, is an important application of vacuum technology. This article describes the unique features of low gas pressure plasma, generation of plasma discharge and various plasma parameters. Plasma-wall interaction, which is very important for many plasma-related technologies, is also discussed considering the collisionless sheath model.

著者

神田 晶申 田中 翔 後藤 秀徳 友利 ひかり 塚越 一仁

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.53, no.2, pp.85-93, 2010 (Released:2010-03-18)

参考文献数

43

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Present understanding of electric transport in graphene, a crystalline layer of carbon, is reviewed. In the first part, emphasis is placed on the gap between the ideal and reality of electron transport, which is mostly caused by disorder (charged impurities) in the experimental samples. Disorder which affects the graphene transport originates mainly from charged impurities in the substrate, comtaminants on the graphene surface due to, e.g., resists and sticky tapes, and absorbed gas molecules. The amount of charged impurities and the methods to remove them are discussed. In the second part, the characteristic phenomena in multilayer graphene are explained for spins and Cooper-pair transport, which are relevant to the nonuniform distribution of the carrier density under nonzero gate voltages.

著者

宮地 賢一

出版者

一般社団法人 日本真空学会

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.32, no.12, pp.869-874, 1989-12-20 (Released:2009-10-20)

被引用文献数

1

著者

小駒 益弘

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.51, no.1, pp.2-7, 2008 (Released:2008-03-18)

参考文献数

12

被引用文献数

3

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Kogoma and coworkers previously reported that a homogenous glow plasma can be sustained using a barrier-type electrode system in an atmospheric pressure He gas. This approach succeeded in the surface treatment of industrial plastic films and deposition of solid substances that have usually treated in the low pressure glow plasma system. So, the use of atmospheric pressure glow plasma (APG) system should reduce the costs of plasma treatment for many kinds of the solid materials.   In the review, at first, the basic theory of the atmospheric-pressure glow plasma will be introduced to explain how to attain the homogenous glow plasma in high pressure condition. Then, the prospects will be presented for different styles of low temperature atmospheric pressure plasma systems. In the final part, some application studies such as organic film deposition, silica film deposition and surface treatment of liquid crystal polymer using APG plasma will be shown.

著者

渡邊 幸志

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.52, no.6, pp.351-363, 2009 (Released:2009-07-15)

参考文献数

65

被引用文献数

1

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Because diamond has extremely superior characteristics in many physical properties and device performance indices compared with main current semiconductor materials, it is highly expected as “an ultimate semiconductor material.” Diamond is an ever-evolving material for semiconductor production, and this fact is supported by the technology for synthesizing high quality diamond called the chemical vapor deposition (CVD) method. Till now, various specific techniques have been proposed and used to implement the CVD method. Recently, the microwave plasma CVD method has been becoming standard. As demonstrated by the history of the production of semiconductor materials such as silicon, diamond synthesis requires not only an increase in the crystalline quality of produced diamond but also the production of large size diamond crystals. These efforts are accelerating in the world, but, on the other hand, a breakthrough or significant advance in the development in diamond synthesis technologies is required. In other words, the microwave plasma-assisted CVD method is now becoming a standard technique for diamond synthesis, but one of the important aspects in future diamond research includes determining whether this method can be a perfect final approach for synthesizing large diamond crystals quickly and effectively.   This paper discusses the characteristics of diamond when used as a semiconductor device substrate, together with the microwave plasma-assisted CVD method which is currently one of the representative diamond synthesis methods. Also this paper describes the cathodoluminescence method usually used to evaluate synthetically produced diamond.

著者

青木 小三郎

出版者

一般社団法人 日本真空学会

雑誌

真空工業 (ISSN:18837174)

巻号頁・発行日

vol.3, no.10, pp.317-320, 1956 (Released:2009-09-29)

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薄膜理論の追及と真空技術の発達と相伴つて真空応用の光学は十数年間に異常な進歩を遂げた。真空蒸着の特徴は他の方法では不可能である各種の物質の極めて薄い等厚膜を作り得ることである。此薄膜は強く安価でなければ実用価値は低減するので、今日迄非常な苦辛と努力を払い一応成功の域に達した。今後一層苦難に耐え此事業を発展させたい。

著者

松崎 浩之

出版者

一般社団法人 日本真空学会

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.50, no.7, pp.467-474, 2007 (Released:2008-01-01)

参考文献数

15

被引用文献数

3 4

著者

窪田 好浩 辰巳 敬

出版者

一般社団法人 日本真空学会

雑誌

真空 (ISSN:05598516)

巻号頁・発行日

vol.49, no.4, pp.205-212, 2006 (Released:2007-04-12)

参考文献数

68

被引用文献数

2 4