著者

加藤 一実 鈴木 一行 符 徳勝 西澤 かおり 三木 健

出版者

公益社団法人日本セラミックス協会

雑誌

日本セラミックス協会学術論文誌 : Nippon Seramikkusu Kyokai gakujutsu ronbunshi (ISSN:18821022)

巻号頁・発行日

vol.110, no.1281, pp.403-407, 2002-05-01

被引用文献数

1

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Ca_2Bi_4Ti_5O_<18> (CBTi245) thin films were deposited by spin-coating a precursor solution of metal alkoxides on Pt-passivated Si substrates. Thickness of the as-deposited amorphous layer affected the nucleation site, microstructure and electrical properties. The onset of crystallization of thin films to a pyrochlore phase was below 550℃ via rapid thermal annealing in oxygen. A perovskite phase developed by further annealing at temperatures of 650 or higher. The CBTi245 thin films which were prepared by multi-coating and multi-crystallizing of the 20 nm-thick amorphous layer showed random orientation, a columnar-like structure, and P-E hysteresis loops.