- 著者
-
加藤 一実
鈴木 一行
符 徳勝
西澤 かおり
三木 健
- 出版者
- 公益社団法人日本セラミックス協会
- 雑誌
- 日本セラミックス協会学術論文誌 : Nippon Seramikkusu Kyokai gakujutsu ronbunshi (ISSN:18821022)
- 巻号頁・発行日
- vol.110, no.1281, pp.403-407, 2002-05-01
- 被引用文献数
-
1
Ca_2Bi_4Ti_5O_<18> (CBTi245) thin films were deposited by spin-coating a precursor solution of metal alkoxides on Pt-passivated Si substrates. Thickness of the as-deposited amorphous layer affected the nucleation site, microstructure and electrical properties. The onset of crystallization of thin films to a pyrochlore phase was below 550℃ via rapid thermal annealing in oxygen. A perovskite phase developed by further annealing at temperatures of 650 or higher. The CBTi245 thin films which were prepared by multi-coating and multi-crystallizing of the 20 nm-thick amorphous layer showed random orientation, a columnar-like structure, and P-E hysteresis loops.