著者

中 庸行 磯野 吉正 田中 武司 寺山 暢之

出版者

一般社団法人日本機械学会

雑誌

日本機械学会論文集. A編 = Transactions of the Japan Society of Mechanical Engineers. A (ISSN:03875008)

巻号頁・発行日

vol.64, no.620, pp.1061-1068, 1998-04-25

参考文献数

19

被引用文献数

2

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This paper describes the effect of density of Diamond-Like Carbon (DLC) thin film on tribological property. DLC thin films having the density of 1.9-2.5 g/cm<SUP>3</SUP> were prepared on (111) of Silicon surface by the hot cathode PIG Discharge Type Plasma-Enhanced CVD method. Ball on disk friction experiments were carried out using diamond ball. The friction coefficients increased from 0.05 to 0.20 with increasing film density in the density range below 2.185 g/cm<SUP>3</SUP>, but those did not change above 2.185 g/cm<SUP>3</SUP>. The specific wear value also increased with increasing film density. The effect of film density on tribological property between DLC thin film and diamond pin was examined by molecular dynamics simulation. The diamond pin slides to uniaxial direction on DLC thin film having the density 1.5-3.0 g/cm<SUP>3</SUP>. Atoms of DLC thin film having the density of 1.5 g/cm<SUP>3</SUP> were moved most actively. Atomic movement being like to shear deformation was observed during frictional processes. The effect of film density on friction coefficients in MD simulations was similar to that in experiments qualitatively.