著者

中村 肇 金光 陽一 雉本 信哉 松田 浩一 河島 浩一

出版者

一般社団法人日本機械学会

雑誌

Dynamics & Design Conference

巻号頁・発行日

vol.2003, pp."150-1"-"150-6", 2003-09-16

---

We are developing an electromagnetically levitated vibration isolationsystem for micro vibration isolation. It supports a floating isolationtable without any mechanical contact by using active magnetic bearings to reduce vibration from a floor. The system aims to regulate the microvibration in 6 degree of freedom. Two kinds of controller are designed and confirmed to levitate the table stably by experiments. A series of simulation show that the controllers have good effect on the vibration isolation.