著者

宮崎 康次 黒崎 潤一郎 笠井 哲郎 原田 一興 塚本 寛

出版者

一般社団法人日本機械学会

雑誌

熱工学コンファレンス講演論文集

巻号頁・発行日

vol.2007, pp.421-422, 2007-11-23

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We fabricated bismuth-telluride based thin films and their in-plane thermoelectric micro-generators on a free standing silicon nitride thin film by using the flash evaporation method through shadow masks. The shadow masks are fabricated by standard micro-fabrication processes. The fabricated micro-generators are just put on a heated plate, and the open-circuit output voltages of micro-generators are measured by a digital voltmeter. The maximum measured voltage is about 40mV at 10K temperature difference. The output voltage is comparable to the bulk value although the device consists of as-grown thin films.