著者

永吉 径 神谷 庄司 ガスパー ジョアオ オリバー ポール

出版者

一般社団法人日本機械学会

雑誌

年次大会講演論文集 : JSME annual meeting

巻号頁・発行日

vol.2009, no.8, pp.59-60, 2009-09-12

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A method of damage based prediction of static strength of MEMS structures fabricated by Bosch process was proposed. Four points bending tests in different bending directions were performed in order to evaluate the distribution of damage-characteristics on the processed surface as a function of position along the etching direction. As a result, the static strength of notched specimens was successfully predicted from the characteristics obtained with the specimens without notch.-