著者

伝宝 一樹

出版者

公益社団法人 日本表面真空学会

雑誌

表面と真空 (ISSN:24335835)

巻号頁・発行日

vol.62, no.6, pp.318-323, 2019-06-10 (Released:2019-06-10)

参考文献数

34

被引用文献数

3

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We have successfully created a Direct Simulation Monte Carlo (DSMC) model on a commercial FEM software COMSOL Multiphysics (COMSOL). As far as we know, this is the first DSMC model developed on COMSOL. Since two particles as a colliding pair cannot be sampled simultaneously from the same population in the Particle-tracing module of COMSOL, a new inter-molecular collision scheme named “quasi-Nanbu scheme” has been introduced to the model. The results obtained for benchmark problems using the present DSMC model agree well with those from a theory and other DSMC codes.