著者

崔 埈豪 日比 貴之 古野 晃久 川口 雅弘 加藤 孝久

出版者

一般社団法人 日本トライボロジー学会

雑誌

トライボロジスト (ISSN:09151168)

巻号頁・発行日

vol.62, no.3, pp.228-235, 2017-03-15 (Released:2017-03-16)

参考文献数

21

被引用文献数

5

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In our previous study, microstructure and mechanical properties of diamond-like carbon (DLC) films prepared by plasma based ion implantation and deposition using toluene (C7H8) as a source gas were investigated. It was reported that G-peak full width at half maximum [FWHM(G)] shows a maximum value at a G-peak position of around 1540 cm-1, indicating structural changes of DLC films; polymer-like (PLC) to diamond-like carbon (DLC) structure in lower wavenumbers than 1540 cm-1 and diamond-like to graphite-like carbon (GLC) structure in higher wavenumbers than 1540 cm-1. Further, two linear relationship between mechanical properties and FWHM(G) were observed depending on the microstructure of DLC films. In this study, we report the dependence of source gases, methane (CH4), acetylene (C2H2) and toluene, on the microstructure of DLC films, and the correlation between microstructure and mechanical properties of DLC films. It was found that FWHM(G) shows a maximum at a G-peak position of around 1540 cm-1 regardless of source gases. Furthermore, there exists a linear relationship between PL background component and hydrogen content of the films, that is, hydrogen content can be estimated by a simple equation regardless of source gases. The correlation of hardness with FWHM(G) of DLC films prepared using CH4 and C2H2 gas shows good agreement with the correlation line of DLC-GLC provided in the case of C7H8.