著者

佐藤 宏司 新井 史人 福田 敏男 糸魚川 貢一 塚原 靖典

出版者

The Institute of Electrical Engineers of Japan

雑誌

電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)

巻号頁・発行日

vol.120, no.3, pp.128-133, 2000-02-20 (Released:2009-04-01)

参考文献数

13

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Parallel beam structure has many significant features, as follows. (i) The tip moves in parallel at the end. (ii)This structure converts the small displacement into the large strain. (iii) Each unit doesn't interfere to the other units by piling up this structures. We used this structure for piezoelectric vibrating gyroscope (angular rate sensor). In this paper, we analyzed features of the parallel beam structure by Finite Element Method, and showed that the resonance frequency of the drive unit and the sensor unit can be easily adjusted by changing the mass at the tip. From this result, this structure suits for the gyroscope. Experimental results are shown.