著者
佐野 知巳 春本 道子 島津 貴之 伊与田 義智 井上 享
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
巻号頁・発行日
vol.130, no.8, pp.373-377, 2010-08-01 (Released:2010-08-01)
参考文献数
14

The ultra compact optical RGB multiplexer for a pocket projector that size is 8.8(W)×6.0(D)×4.0(H)(mm) was developed by the micro-molding processing. The RGB multiplexer was constructed by the optical filter and three lenses for each RGB laser diode in the molding packaging. The interface of the optical filter and the resin was not existed an air gap by optimizations of molding conditions. We were successfully projected onto a screen using the RGB multiplexer.
著者
野村 健太 南保 英孝 木村 春彦
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
巻号頁・発行日
vol.134, no.7, pp.206-211, 2014 (Released:2014-07-01)
参考文献数
18

In this paper, we investigated influence on plant bioelectric potential by basic human behaviors. We analyzed four basic human behaviors such as touching the plant, opening the door, approaching the plant and turning on the lighting. As a result, the special response of bioelectric potential were influenced by each behavior. Bioelectric potential shows the impulse responses due to the behavior. Therefore we tried to learn and recognize human behaviors by extracting a characteristic from plant bioelectric potential. The method to recognize basic human behaviors that we propose uses a low level ingredient of cepstrum of plant bioelectric potential. Some data didn't recognize correctly because of individual difference of human behaviors, however, F-measure became an average of 0.76. It shows that the proposal method may be effective way to recognize basic human behaviors from plant bioelectric potential.
著者
高橋 健 早瀬 仁則 初澤 毅
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
巻号頁・発行日
vol.120, no.4, pp.156-161, 2000-03-20 (Released:2009-04-01)
参考文献数
8
被引用文献数
1

A fabrication process of tungsten probes for surface profile measurements has been improved. The probe contour is designed to have an optimum shape for the use of tapping stylus. An improved DC electropolishing is applied for the elimination of surface impurities and smaller stylus radius with exponential contour, which uses an electrical flushing and a surface tension control of the electrolyte. The process is experimentally confirmed to have advantages for the fabrication of the stabilized stylus contour, typically with a stylus radius of 30nm. They have smoother contours compared with those fabricated by AC electropolishing.
著者
原 仁 岸 直輝 岩岡 秀人
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
巻号頁・発行日
vol.122, no.5, pp.274-279, 2002 (Released:2003-03-28)
参考文献数
11

We have developed an infrared detector and a micro variable infrared filter for micro-spectrum analyzing devices. Two infrared detectors and the infrared filter were mounted on the identical package. A micro-spectrum analyzing device of 1cm3 volume as the two wavelength NDIR system for combining these elements with the infrared source was able to measure the concentration of carbon dioxide.
著者
林部 林平 渡辺 誠一 伊藤 秀明
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
巻号頁・発行日
vol.122, no.1, pp.23-28, 2002 (Released:2003-03-28)
参考文献数
9

The authors produced a driving circuit for resistive humidity sensor using the timer IC and applied it to the thermo-hygrometer. This paper describes as follows: (1) a simple driving circuit using the timer IC was produced and the theoretical equation of its oscillating frequency was derived. (2) relative humidity as low as 10 %RH could be measured using the driving circuit for resistive humidity sensor. (3) the measurement error of the thermo-hygrometer using the driving circuit was achieved within ± 3 %RH above 30 %RH.
著者
平井 義和 Sadik Hafizovic Jan G. Korvink 田畑 修
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
巻号頁・発行日
vol.123, no.9, pp.368-375, 2003 (Released:2003-12-01)
参考文献数
10
被引用文献数
3 3

We have developed an X-ray lithography simulation system X3D (Moving Mask Deep X-ray Lithography Simulation System for 3-Dimensional Fabrication) for the first time, that is tailored to simulate the fabrication process of 3-dimensional microstructures using the M2DXL (Moving Mask Deep X-ray Lithography) technique. The newly developed X3D can simulate the progress of developed PMMA surface with developing time using chemical dissolution rate data as a function of dose energy. The simulation system consists of three modules: mask generation, exposure, and development. The exposure module calculates a dose energy distribution over a PMMA using a mask pattern and its movement pattern, and then converts this dose energy to a dissolution rate of PMMA. The development module adopted a "Fast Marching Method" to calculate the resultant 3D shape of the PMMA. In this paper, a new experimental method to determine dissolution rate as a function of dose energy that dominates the simulation accuracy was proposed. An experimental procedure of the new experimental method, the determined dissolution rate, and verification of the measured results are presented.
著者
大田 明博 臼田 孝 中野 英俊
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
巻号頁・発行日
vol.123, no.6, pp.203-208, 2003 (Released:2003-09-01)
参考文献数
8

The calibration procedures of charge amplifier (CA) on vibration acceleration standard are described. The calibration principle and fundamental calibration procedures are explained in detail. Typical commercial CAs (3 types, 4 CAs) are evaluated in terms of the frequency sensitivity gain, the long-term stability, the linearity for input charge, the linearity for gain setting and the effects of environmental conditions (temperature and humidity). The maximum discrepancy in the sensitivity gain is approximately 4 % among the tested CAs. A relative sensitivity gain difference of 1.5 % still remains when CAs of the same type are compared. It should be mentioned that a difference of 1.5 % is not negligible. Such a large difference has not been commonly observed up to the present time. Based on these experimental results, the technical guides for charge amplifier calibration are summarized.
著者
伴野 啓介 伴野 明
出版者
一般社団法人 電気学会
雑誌
電学論E (ISSN:13418939)
巻号頁・発行日
vol.138, no.8, pp.343-353, 2018-08-01

<p>It has been suggested that the <i>Kansei</i> Multi-Media Display (KMMD) is able to emit air flows and scents in addition to conventional audio-visual information through the display. This display is characterized as follows: the display has slits and pits to emit air flows from a position close to projected pictures due to a system where the display is equipped in the back with an air blower and an air flow direction controller. This study aimed to show the psychological effects of two content layouts for cool refreshment, which were produced based on the characteristics of this multi-media display. The possibilities for function and application of the KMMD were examined. An experiment of a virtual fan created as a three-dimensional CG assessed the effects of cool refreshment and the feeling of presence induced by the air flows, which was connected to the swing movement of the fan and emitted from a position close to the image of the fan. Further, an experiment with seasonal images was conducted, providing aromas, which have been reported to affect an individual's sense of cold, when showing video scenes of a cold region. This experiment revealed cross modal physiological effects, such as the decline of the feeling of temperature and the temperature of the skin surface, which were induced subjectively and psychologically by the attribute of this scene.</p>
著者
山田 芳靖 土方 啓暢 川原 伸章 藤坂 洋一 中川 誠司
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society (ISSN:13418939)
巻号頁・発行日
vol.124, no.8, pp.272-277, 2004-08-01
参考文献数
4
被引用文献数
7 4

Voice recognition utilizing bone-conducted voice, which is very robust under noisy environment, has been investigated. The suitability for voice recognition and voice communication of bone-conducted voice recorded at several measurement points on human head was evaluated using LPC cepstrum distance (LCD) and Speech Transmission Index (STI). Experimental results show that forehead and cheek are good as the acquisition points of bone-conducted voice. In order to improve the quality of bone-conducted voice, a novel sensor, which has an inclined frequency response, was fabricated. Using the sensor, acquired bone-conducted voice has a similar frequency response as that of air-conducted voice. Spectral Subtraction is suggested as a method to improve the voice recognition ratio of bone-conducted voice.
著者
山中 誠 安田 隆
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
巻号頁・発行日
vol.133, no.5, pp.155-156, 2013-05-01 (Released:2013-05-01)
参考文献数
4

This paper presents a novel QCM (quartz crystal microbalance) sensor for detecting interactions between membrane proteins and their ligands using liposomes derived from human cells. First, liposomes having BCR (B-cell receptor) were derived directly from cell membranes by stimulating human lymphocyte cells, Ramos, with NaB (sodium butyrate). Next, the liposomes were separated from the cells by filtration and micronized by sonication. Then, the liposomes were immobilized on the surface of a QCM sensor chip using cell-anchoring molecules. Several experiments demonstrated that ligand detection is achieved by frequency reduction with application of the antibody against BCR.
著者
鈴木 孝明 寺尾 京平 鈴木 博之 新田 祐幹 高尾 英邦 下川 房男 大平 文和 平丸 大介 小寺 秀俊
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
巻号頁・発行日
vol.133, no.5, pp.139-146, 2013-05-01 (Released:2013-05-01)
参考文献数
20

In this study, we propose a simple observation method of the shape and molecular orientation of the chromosomes extracted from cells for a sample-to-analysis system in clinical diagnosis. The proposed technique is composed of total preparation technique such as cell immobilization, chromosomes extraction, stretching, suspension and analysis using a disposable microchip controlled by centrifugal force only. It is experimentally confirmed that the chip having two kinds of microstructures arranged concentrically on a chip immobilizes cells and stretches chromosomes extracted from the immobilized cells.
著者
中島 雄太 楊 寅 南 和幸
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
巻号頁・発行日
vol.133, no.12, pp.358-364, 2013-12-01 (Released:2013-12-01)
参考文献数
13

This paper presents a cell compression stimulus microdevice intended to evaluate the real-time response of cells to compression stimuli. The presented device consists of cell inlet ports, a pressure inlet port, a gasket, microchannels, culture chambers, and a diaphragm on the culture chamber for applying compressive pressure to cells. Compression stimuli applied to the cells can be controlled by regulating the expansion of the diaphragm via a pressure control. The device permits the observation of cellular responses to compressive pressure in real time because it is made of transparent materials and stimulates the cells without deforming the cell culture surface, when observed by optical microscope. We observed the cellular deformation and response behavior using a fabricated microdevice in real time. The changes of intracellular calcium concentration before and after compressive stimuli were observed by the fabricated device. Also, the intracellular maximum strain part and strain distribution of a cell that received compression stimulus were clarified by FEM analysis. These results indicate the device is expected to clarify the cellular mechanoreceptor mechanisms and signal transduction pathways and facilitate the control of stem cell differentiation by a combination of the experimental results and FEM analysis results.
著者
Fikret Yildiz Tadao Matsunaga Yoichi Haga
出版者
The Institute of Electrical Engineers of Japan
雑誌
電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
巻号頁・発行日
vol.136, no.12, pp.515-521, 2016-11-01 (Released:2016-12-01)
参考文献数
21
被引用文献数
1

This paper reports part of a novel packaging method for a capacitive micromachined ultrasonic transducer (CMUT) based ultrasonic endoscope using low temperature co-fired ceramic (LTCC) side via architecture. An annular ring array CMUT device is designed and fabricated for packaging. LTCC is used as a prime wafer for CMUT fabrication and LTCC side via structure is achieved by hexagonal shape dicing of the fabricated CMUT device. A hexagonal shaped polyimide substrate mounted at the backside of the CMUT is used as a base layer for IC integration (flip-chip bonding) and also provides mechanical support to the CMUT. Cr/Au electrodes were patterned on the LTCC side via and polyimide substrate to achieve electrical connection between CMUT arrays and IC circuits. Au bonding pads were successfully completed on the polyimide substrate by electroplating for flip-chip bonding. Flip-chip mounting on the polyimide substrate is described and the electrical resistance of bumps is measured using the 4-probe method. The difference between the measured and calculated resistance is discussed. This method with the indirect connection of CMUT arrays and IC circuits has flexibility for high performance tube-shaped CMUT packaging with small diameters for intravascular imaging.
著者
井上 聡史 高橋 巧也 久米村 百子 石橋 和徳 藤田 博之 橋口 原 年吉 洋
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌. E, センサ・マイクロマシン部門誌 (ISSN:13418939)
巻号頁・発行日
vol.137, no.6, pp.152-158, 2017

<p>In this paper, we report on a proof-of-concept level energy harvester device that could earn electric power of 0.093 µW/cm<sup>2</sup> by the fluidic motion in a PDMS (polydimethylsiloxane) micro fluidic channel placed on a silicon substrate with built-in permanent electrical charges or so-called electrets. Targeting implantable medical devices such as respiratory pace-maker, the heart beat or aspiration is thought to be the source of motion as a final shape of the energy harvesting system.</p>
著者
山下 崇博 Khumpuang Sommawan 三宅 晃司 伊藤 寿浩
出版者
The Institute of Electrical Engineers of Japan
雑誌
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society (ISSN:13418939)
巻号頁・発行日
vol.132, no.4, pp.66-70, 2012-04-01
被引用文献数
2 1

Conductive polymer coated micro-cantilever array made by reel-to-reel continuous fiber process as the electrical contact components for woven electronic textile was investigated. We report the novel cantilever releasing method using air injection and the results of patternable CYTOP and organic conductive polymer using nanoimprinting method. The conductive organic material used in this study is PEDOT:PSS (poly(3,4-ethylenedioxythiophene) poly(4-styrenesulfonate)). Micro-cantilever contact array is realized to compose the electrical circuit through the large area woven textile. The contact resistance of 480 Ω is hold on for over 500 times. Contact resistance measurements revealed that an electric current begins to flow with smaller contact force for PEDOT:PSS coated cantilever array structure than for PEDOT:PSS film structure. There is no appreciable wear on cantilever surface due to its movability after 10<SUP>3</SUP> cycles contact test with 0.5 N contact force. Based on these results, PEDOT:PSS coated micro-cantilever array have excellent potential as electrical contact components between weft and warp for woven electronic textile.
著者
勝部 昭明
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
巻号頁・発行日
vol.122, no.6, pp.296-299, 2002 (Released:2003-03-28)
参考文献数
26

This paper reports recent research activities and developments of odor sensor and taste sensor. The application fields and market places of these sensors are expanding by the remarkable progress both in sensing devices and signal processing engines. These sensor developments are first reviewed by comparing the differences between odor and taste detection technologies. Then, the quantitative analysis method of taste sensor is discussed and finally mentioned about a flavor sensor consisting of taste sensor and odor sensor.
著者
本多 史明 細野 智史 末重 良宝 藤野 真久 須賀 唯知 一木 正聡 伊藤 寿浩
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
巻号頁・発行日
vol.133, no.11, pp.B320-B325, 2013-11-01 (Released:2013-11-01)
参考文献数
9

PZT (Pb(Zrx,Ti1-x)O3) thin film capacitors using Nano-transfer method has been developed for the fabrication technology of smaller capacitors. The adhesion strength of Pt to SiO2 was shown to be important among process factors. The adhesion force was shown to be originated from the material diffusion in the crystallization process mainly by the observation of TEM and XPS analysis. In this paper, diffusion of ingredients of PZT which is supposed to be one of the factors of the variation was investigated. It was confirmed that diffusion of Pb certainly occurs and this diffusion reinforces the adhesion strength in accordance with the Pt thickness. It is concluded that the diffusion is surely one of the factors of the variation of the adhesion strength.
著者
梶山 智晴 富田 裕之 宮原 裕二
出版者
一般社団法人 電気学会
雑誌
電気学会論文誌E(センサ・マイクロマシン部門誌) (ISSN:13418939)
巻号頁・発行日
vol.119, no.10, pp.464-469, 1999-10-01 (Released:2008-12-19)
参考文献数
4
被引用文献数
1 1

We have developed a new method for cleaning flow-through cells by using microbubbles and ultrasonic (US) standing waves. A standing wave generated by US transducers at 1 MHz was used to trap microbubbles at node positions of the sound pressure. We were also able to control the microbubbles' positions spatially through frequency modulation. We found that these microbubbles were very effective for washing microbeads out of flow-through cells, particularly when frequency-modulated US irradiation was used. The proposed method promises to be very useful for cleaning the flow-through cells in small analytical instruments.