著者

岩田 達夫

出版者

東海大学

雑誌

東海大学紀要 工学部 (ISSN:05636787)

巻号頁・発行日

vol.31, no.2, pp.p107-111, 1991

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A new method for measuring vacuum pressure by field emission microscopy is described The relationship between the time constant of exponential decay of field emission current caused by the adsorption of residual gas and the ambient pressure has been derived and examined. The method allows to measure the pressure below x-ray limit of the conventional Bayard-Alpert ionization pressure gauge.