著者

山本 節夫 和田 宏文 栗巣 普揮 松浦 満 下里 義博

出版者

公益社団法人日本磁気学会

雑誌

日本応用磁気学会誌 (ISSN:18804004)

巻号頁・発行日

vol.27, no.4, pp.363-366, 2003-04-01

被引用文献数

2 5

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A novel sputtering method using an electron-cyclotron-resonance (ECR) microwave plasma was used to perform reactive sputter-deposition of Ni-Zn ferrite thin films. Ni-Zn spinel ferrite thin films with preferential orientation of (400) and relatively low coercivity of 15 Oe were obtained at a high deposition rate of 14 nm/min. and at temperatures lower than 200 ℃. To achieve this high deposition rate, the configuration of the ECR sputtering apparatus and processing parameters such as the microwave input power, target voltage, and oxygen partial pressure were carefully optimized. Reactive ECR sputtering is one of the most suitable methods for preparation of ferrite thin films applicable to magnetic devices such as MMICs, isolators and circulators.

著者

土井 孝紀 田万里 耕作 柿原 康男 山本 節夫 栗巣 普揮 松浦 満

出版者

公益社団法人日本磁気学会

雑誌

日本応用磁気学会誌 (ISSN:18804004)

巻号頁・発行日

vol.22, no.3, pp.125-128, 1998-03-01

被引用文献数

5

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Co-γFe_2O_3 longitudinal magnetic recording media obtained by annealing CoO-Fe_3O_4 were prepared on NiO underlayer. The coercivity HC was varied. with the Co content, namely, the atomic ratio of Co/Fe in Co-γFe_2O_3, and the oxygen partial pressure in deposition of Co-O-Fe_3O_4. The H_c of the media with Co/Fe=4 at% was 2000-3500 Oe, 1.3-3.6 times higher than that of Co-γFe_2O_3/NiO media without NiO underlayer. The grain size of Co-γFe_2O_3 became smaller with decreasing the thickness. The read/write characteristics of the media with no overcoat were evaluated in contact recording. Co-γFe_2O_3 media on NiO had higher D_<50> and lower medium noise than those of the media without NiO underlayer. kywe>Co-γFe_2O_3 / NiO underlayer / coercivity / longitudinal magnetic recording medium / R/W characteristic / contact recording</kywe>