著者

武下 臣 伊藤 秀男 花上 康宏

出版者

一般社団法人資源・素材学会

雑誌

Journal of MMIJ (ISSN:18816118)

巻号頁・発行日

vol.123, no.12, pp.704-706, 2007-12-25 (Released:2010-12-17)

参考文献数

5

被引用文献数

2 5

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Yokkaichi plant of Mitsubishi Materials Corporation was established in 1968. The products are high purity polycrystalline silicon (polysilicon) for use in semiconductors. The productivity expanded from 1.5t/M up to 1800t/Y in 40 years. Hydrogen reduction of trichlorosilane on heated silicon rod, commonly called "Siemens' process", had progressed at Yokkaichi plant. The outline of the process is described.