著者

稲吉 さかえ

出版者

一般社団法人 日本真空学会

雑誌

Journal of the Vacuum Society of Japan (ISSN:18822398)

巻号頁・発行日

vol.57, no.8, pp.299-302, 2014 (Released:2014-08-25)

参考文献数

13

被引用文献数

2

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The gas pressure of a vacuum system is determined by the outgassing from its surfaces. Outgassing can be categorized into desorption, diffusion and permiation. In this text, the mechanisms of these modes, as well as the countermeasures for them, are discussed. Some methods to evaluate the outgassing rate are also introduced.