著者

花戸 立夫 裴 鐘石 水野 皓司

出版者

一般社団法人 レーザー学会

雑誌

レーザー研究 (ISSN:03870200)

巻号頁・発行日

vol.26, no.7, pp.546-550, 1998-07-15 (Released:2010-08-25)

参考文献数

32

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A small aperture or antenna can confine electromagnetic radiation to dimensions far smaller than the wavelength. Scanning such a structure in close proximity to an object can yield microscopic images with correspondingly high resolution. The benefit of using microwaves and millimeter-waves in scanning near-field microscopy lies in the promise of new types of material contrast. A good example is the mapping of electronic transport properties. In this review an overview of scanning near-field microwave, millimeter-wave, and submillimeter-wave microscopy is presented, a millimeter-wave microscope system using a slit-type probe is described in detail, and the application of this microscope for the visualization of photo-excited free carriers in a silicon substrate is demonstrated.