著者

萩原 利宣 枝長 孝幸 佐藤 海二

出版者

一般社団法人日本機械学会

雑誌

年次大会講演論文集 : JSME annual meeting

巻号頁・発行日

vol.2004, no.7, pp.307-308, 2004-09-04

---

This paper describes a new optical switch based on MEMS techniques. This comprises two plates which have many electrodes on its surface and belt-shaped thin film mirrors which are put between the plates. The shape of the mirror is deformed by electrostatic force and the optical path is controlled. The switch has a simple structure and basically easy to assemble. It is easy to change a optical path greatly by a relatively small stress to act on the mirror. The pates and the mirror are made by MEMS techniques. In this paper, the principle of the optical switch is introduced and the behavior of the experimental switch is confirmed.