著者

黎 シン 徳永 英幸 蔡 茂林 舩木 達也 川嶋 健嗣 香川 利春

出版者

一般社団法人 日本フルードパワーシステム学会

雑誌

日本フルードパワーシステム学会論文集 (ISSN:18803121)

巻号頁・発行日

vol.38, no.1, pp.1-6, 2007 (Released:2008-09-29)

参考文献数

10

被引用文献数

4 7

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A new pneumatic non-contact handling method is discussed in this paper, in which swirling flow is employed. Air flows into a vortex cup tangentially through a nozzle, and swirls along the wall to make a vacuum at the central area. Then, air is discharged to the atmosphere through a thin gap between the cup and a wafer under the cup. Analysis is conducted by dividing air flow into three parts. They are flow rate characteristics of the nozzle, swirling flow inside the cup and flow through the gap. Pressure distributions inside the cup and the gap are discussed and their analytical results are validated experimentally. It is clear that the vacuum is caused by the swirling air inside the cup, and it depends on the gap and the supply pressure. Furthermore, it is found that the wafer can be handled and kept in a balanced state automatically during a certain range of a considerably thin gap depending on the weight of the wafer. However, the wafer will fall down over this range.

著者

蔡 茂林 藤田 壽憲 香川 利春

出版者

一般社団法人 日本フルードパワーシステム学会

雑誌

日本フルードパワーシステム学会論文集 (ISSN:18803121)

巻号頁・発行日

vol.33, no.4, pp.91-98, 2002-07-15 (Released:2011-03-03)

参考文献数

8

被引用文献数

4 6

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In previous research we proposed to quantify available energy of compressed air by exergy. In this paper we discuss the distribution of available energy supplied to a pneumatic cylinder in cyclic actuation. First, we examined energy distribution for ideal actuation of cylinder driven by a meter-out and meter-in circuit It is clarified that over half of supplied available energy is used for mechanical work to load and for velocity control of the piston, and remaining energy is exhausted without being used. For actual actuation the method for calculating distribution of available energy is established and this distribution is clarified by simulation of cylinder responses. It is found that the available energy for piston acceleration, work against internal friction and loss in heat transfer are relatively small. As a result, the paper concludes that utilization of exergy is feasible and recommendable for analyzing distribution of available energy of compressed air in pneumatic equipment.