著者

黎 シン 徳永 英幸 蔡 茂林 舩木 達也 川嶋 健嗣 香川 利春

出版者

一般社団法人 日本フルードパワーシステム学会

雑誌

日本フルードパワーシステム学会論文集 (ISSN:18803121)

巻号頁・発行日

vol.38, no.1, pp.1-6, 2007 (Released:2008-09-29)

参考文献数

10

被引用文献数

4 7

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A new pneumatic non-contact handling method is discussed in this paper, in which swirling flow is employed. Air flows into a vortex cup tangentially through a nozzle, and swirls along the wall to make a vacuum at the central area. Then, air is discharged to the atmosphere through a thin gap between the cup and a wafer under the cup. Analysis is conducted by dividing air flow into three parts. They are flow rate characteristics of the nozzle, swirling flow inside the cup and flow through the gap. Pressure distributions inside the cup and the gap are discussed and their analytical results are validated experimentally. It is clear that the vacuum is caused by the swirling air inside the cup, and it depends on the gap and the supply pressure. Furthermore, it is found that the wafer can be handled and kept in a balanced state automatically during a certain range of a considerably thin gap depending on the weight of the wafer. However, the wafer will fall down over this range.

著者

井上 慎太郎 川嶋 健嗣 舩木 達也 香川 利春

出版者

The Society of Instrument and Control Engineers

雑誌

計測自動制御学会論文集 (ISSN:04534654)

巻号頁・発行日

vol.42, no.7, pp.837-843, 2006-07-31 (Released:2009-03-27)

参考文献数

8

被引用文献数

2

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The measurement-integrated simulation (MI-simulation) is a numerical simulation which feedbacks information of experimental results in order to perform simulations under real conditions. Even if using rough grids, the calculation results become closer to those of experiments. Therefore, the reduction of the calculation time is expected. In this paper, we proposed a monitoring system for pipe flow including unsteady condition using the simulation. The MI-simulation was applied to airflows passed an orifice plate in the pipeline. Firstly, the measured velocities at the downstream of the orifice plate under steady condition were feedback to the simulation. Secondly, the effect of the points and number of velocities to the simulation were investigated. Then, the MI-simulation was applied to an oscillatory flow. The effectiveness of the method was confirmed compared with the experimental results. The calculation time could be much shortened compared with general simulations.

著者

森田 良 稲田 文夫 内山 雄太 梅沢 修一 石橋 雅裕 舩木 達也

出版者

一般社団法人 日本機械学会

雑誌

日本機械学会論文集 (ISSN:21879761)

巻号頁・発行日

vol.83, no.849, pp.16-00526-16-00526, 2017 (Released:2017-05-25)

参考文献数

15

被引用文献数

3

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In industrial fields, as the steam is commonly utilized for heat supply, drying process and so on, it is important to be aware of the steam flow rate in the view point of energy management. However, the steam utilized in the factory is usually wet steam condition. Though it is well known that the wetness affects the flowmeter reading, it is difficult to clarify the effects of the wetness in the steam flow quantitatively in actual plants and factories, and thus far, there has been no established method for estimating the error caused by the wetness of steam flow. In this paper, the difference of ultrasonic flowmeter reading due to wetness of the wet steam flow was clarified experimentally. Ultrasonic flowmeter reading in the wet steam flow was compared with Coriolis flow meter installed after heat exchanger in the steam apparatus. As a result, we clarified the flow rate difference of those two flowmeters was increased with increasing wetness, and the ultrasonic flowmeter reading was almost the same as the value of steam phase flow rate in the wet steam flow. We also proposed the correction method of the ultrasonic flowmeter reading by using density correction in the flow rate formula of the ultrasonic flowmeter. And finally, we clarified the uncertainty of the measured flowrates and their differences were less than 1.0%.