著者

長南 征二 江 鐘偉 増井 慶次郎

出版者

日本機械学会

雑誌

日本機械学会論文集 C編 (ISSN:03875024)

巻号頁・発行日

vol.60, no.570, pp.p498-505, 1994-02

被引用文献数

1

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Deformation control of a silicon-wafer slicer cutting a crystal ingot is studied analytically. The thin rotating blade is clamped at the outer boundary and prestressed in the radial direction, while the inner periphery is subjected to stationary, distributed in-plane and lateral slicing loads from the workpiece. The deflection of the blade is obtained analytically by introducing the multi-model expansion method, further applying the Galerkin method to the governing equations of the system. Numerical results are presented for an actual SUS 301 blade cutting a 6"-diameter silicon ingot at a speed of 1550 rpm. Two control schemes that maintain the flatness of the rotating blade are examined in detail. In the first scheme, a pair of concentrated lateral forces are applied to the blade to reduce the blade deflection. In the second scheme, a pair of moments are also applied to the blade to improve the flatness of blade. Simulation results obtained show that the application of control moment is more effective than the simple lateral forces to the improvement of flatness of the slicing blade.

著者

田中 真美 長南 征二 江 鐘偉 中島 英貴

出版者

日本機械学会

雑誌

日本機械学会論文集. C編 (ISSN:03875024)

巻号頁・発行日

vol.65, no.631, pp.970-976, 1999-03

被引用文献数

4

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This paper is a study on the valuation and mathematical formulation of human touch sensation. First, the feelings of touch are collected on five natural and chemical fabrics through the SD (Semantic Differential) method questionnaires sent to twenty three examinees. The feelings are valued on each fabric by using the weigthed mean on graded factor feelings. The multiple regression analysis is then introduced to represent the overall evaluation of touch on every fabric by a linear function of the valuations on feelings of touch. Next, a soft tactile sensor made of a PVDF (Polyvinylidene Fluoride) film patch and rubber layers is assembled and slid over the same sample fabrics to collect the surface tactile information on the fabrics. The features on the collected data are then extracted by calculating the temporal average of absolute out signal and using the intensity of power spectral density on the medium frequency range. Comparison of the results show that the PVDF sensor well describes the tactile perception of forefingers.