著者

河田 聡 高岡 秀行 古川 祐光

出版者

社団法人 日本分光学会

雑誌

分光研究 (ISSN:00387002)

巻号頁・発行日

vol.45, no.2, pp.93-99, 1996-04-15 (Released:2010-06-28)

参考文献数

9

被引用文献数

1 1

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We developed a near-field scanning optical microscope (NSOM) giving infrared spectra in an area smaller than the diffraction limit of the infrared light. The developed NSOM features a probe which is equipped with a slit aperture to improve the efficiency in collecting the near-field light. The illumination light is generated with a Michelson interferometer as an interference light and the transmission spectrum of sample at the local position is given through the slit of probe. The experimental results with a test chart and a two-layered film show that the spatial resolution of the IR-NSOM developed depends only on the slit width and not on the wavelength of the illumination light. The spatial resolution of the microscope has been numerically analyzed with finite-difference time-domain (FD-TD) method.