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1 0 0 0 OA Important of MoS<sub>2</sub>-Compound Sputtering even with Sulfur-Vapor Anneal for Chip-Size Fabrication

著者
Shinya - Imai Takuya - Hamada Masaya - Hamada Takanori - Shirokura Iriya - Muneta Kuniyuki - Kakushima Tetsuya - Tatsumi Shigetaka - Tomiya Kazuo - Tsutsui Hitoshi Wakabayashi
雑誌
2020 International Conference on Solid State Devices and Materials
巻号頁・発行日
2020-08-31