著者

Okada Atsushi Toko Kaoru O. Hara Kosuke Usami Noritaka Suemasu Takashi

出版者

Elsevier B.V.

雑誌

Journal of crystal growth (ISSN:00220248)

巻号頁・発行日

vol.356, pp.65-69, 2012-10

被引用文献数

20

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We have fabricated poly-Si thin films on fused silica substrates by the Al-induced crystallization (AIC) method with SiO2 insertion layers of various thicknesses (0–20 nm). The growth morphologies of poly-Si layers were dramatically changed by the SiO2 thickness, i.e., thin layers (2 nm) provided high growth rates and (100) orientations, and thick layers (10 nm) provided low growth rates and (111) orientations. These results showed that the crystal orientation of AIC-Si significantly depends on the diffusion rate of Si atoms into the Al layer.