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1 0 0 0 Observations of Inhomogeneity of 3C-SiC Layers Grown on 6H-SiC Substrates Using Scanning Internal Photoemission Microscopy

著者
K. Shiojima N. Mishina N. Ichikawa M. Kato
出版者
The Japan Society of Applied Physics
雑誌
2017 International Conference on Solid State Devices and Materials
巻号頁・発行日
2017-07-28