著者

Koichi MAEZAWA Umer FAROOQ Masayuki MORI

出版者

The Institute of Electronics, Information and Communication Engineers

雑誌

IEICE TRANSACTIONS on Electronics (ISSN:09168516)

巻号頁・発行日

vol.E106-C, no.9, pp.486-490, 2023-09-01

---

A novel displacement sensor was proposed based on a frequency delta-sigma modulator (FDSM) employing a microwave oscillator. To demonstrate basic operation, we fabricated a stylus surface profiler using a cylindrical cavity resonator, where one end of the cavity is replaced by a thin metal diaphragm with a stylus probe tip. Good surface profile was successfully obtained with this device. A 10 nm depth trench was clearly observed together with a 10 µm trench in a single scan without gain control. This result clearly demonstrates an extremely wide dynamic range of the FDSM displacement sensors.