著者

中尾 政之 石井 和久 佐藤 知正 畑村 洋太郎

出版者

一般社団法人日本機械学会

雑誌

日本機械学會論文集. C編 (ISSN:03875024)

巻号頁・発行日

vol.61, no.583, pp.1021-1026, 1995-03-25

参考文献数

10

被引用文献数

7

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In order to manufacture micromachines, development of micromanipulation is indispensable. This paper treats micro handling tools as end-effectors of a micromanipulation system, and introduces three prototypes of nontweezing tools : air-sucking, electrostatically charged, and surface-tensional ones. These three can handle microparts (l0 to 500 μm in length). In particular, they can perfectly release the microparts with several methods, such as ultrasonic vibration. Through theiractual usage, we confirm the validity of the tools for micromanipulation.