著者

坂本 端樹 宮崎 俊昌 庄司 多津男 芦川 直子 徳永 和俊 増崎 貴 大宅 薫 相良 明男 佐藤 浩之助

出版者

九州大学応用力学研究所

雑誌

九州大学応用力学研究所所報 (ISSN:13455664)

巻号頁・発行日

no.134, pp.61-64, 2008-03

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We have also been developing a plasma-wall interaction (PWI) simulator of which plasma source is a steady-state RF helicon wave plasma supply to demonstrate in situ and real-time measurement and to study PWI phenomena. A helical antenna is surrounding a cylindrical quartz tube of which outer diameter is ~5 cm. The antenna is connected to an RF power supply of which power is up to 5kW through a matching box. A set of two coils produces an axial magnetic field of 0.05T at the plasma center. At present, the electron density at the plasma center is up to ~3 x 10^18 m^(-3) and electron temperature is up to ~10eV. Rather high plasma flux density of ~4 x 10^22 m^(-2) s^(-1) to the substrate has been obtained.