- 著者
-
坂本 端樹
宮崎 俊昌
庄司 多津男
芦川 直子
徳永 和俊
増崎 貴
大宅 薫
相良 明男
佐藤 浩之助
- 出版者
- 九州大学応用力学研究所
- 雑誌
- 九州大学応用力学研究所所報 (ISSN:13455664)
- 巻号頁・発行日
- no.134, pp.61-64, 2008-03
We have also been developing a plasma-wall interaction (PWI) simulator of which plasma source is a steady-state RF helicon wave plasma supply to demonstrate in situ and real-time measurement and to study PWI phenomena. A helical antenna is surrounding a cylindrical quartz tube of which outer diameter is ~5 cm. The antenna is connected to an RF power supply of which power is up to 5kW through a matching box. A set of two coils produces an axial magnetic field of 0.05T at the plasma center. At present, the electron density at the plasma center is up to ~3 x 10^18 m^(-3) and electron temperature is up to ~10eV. Rather high plasma flux density of ~4 x 10^22 m^(-2) s^(-1) to the substrate has been obtained.