著者

古川 亮 増西 桂 古賀 章浩 川島 浩幸 小林 亮夫 籾内 正幸

出版者

一般社団法人 日本機械学会

雑誌

年次大会講演論文集

巻号頁・発行日

vol.2007, pp.317-318, 2007

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For high-resolution retinal camera, we have developed an adaptive optics system using a membrane deformable mirror (DM) with electrostatic actuators. An aberration compensation algorithm is adopted in the system, which can generate appropriate control input by a linear combination of voltage templates prepared in advance, each of that forms a specific Zernike shape approximately. The nonlinear effect and strong coupling of control channels in continuous-surface DM make it difficult to form the desired mirror surface shapes. In this paper, we propose a computational method to obtain the voltage templates using genetic algorithm and grouping electrodes for reducing the number of independent voltage sources. The results show that the method can be used to obtain appropriate applied voltages for high-order Zernike shapes.

著者

池井 寧 山崎 一夫 古賀 章浩 森川 恒 福田 収一

出版者

一般社団法人日本機械学会

雑誌

日本機械学會論文集. C編 (ISSN:03875024)

巻号頁・発行日

vol.60, no.579, pp.3618-3624, 1994-11-25

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The present paper describes a new design of a fluid driven microactuator which comprises a planar piston, a four-way control valve, and a mechanical feedback system that controls the output in accordance with an input displacement. Fabrication processes of the microactuator include bulk micromachining of two sheets of silicon substrate and their assembly by electrostatic bonding to glass plates. The output characteristics were measured supplying the compressed air. Generated output force was partially linear to supplied pressure and to valve displacement. However, the magnitude was asymmetric in terms of driven directions, which results from geometrical configuration essentially introduced by an anisotropic etching of the silicon. The position of the output shaft was sufficiently controlled with a designed magnification factor multiplied to the input displacement in both static and dynamic senses.