著者

津田 展宏 山田 啓文 石田 文彦 宮下 正之 山口 正高

出版者

公益社団法人 精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.55, no.1, pp.146-151, 1989-01-05 (Released:2009-10-08)

参考文献数

4

被引用文献数

3 3

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We have developed the wide range scanning tunneling microscope (STM) to measure surface topography of a diamond turned gold mirror, a gold coated float polished glass surface and so on. Three dimensional positioning of our STM device is achieved not by using a famous piezoelectric tripod, but by monolithic high precision wide ange translation mechanisms, which we call multi-compound parallel spring. One of strong points of this device is that capability of this specially fabricated X-Y stage is to measure over a sample area of 70μm×70μm and is easily cut from a monolith. We have got an information that each diamond tip trace straightness of the turned surface using a high precision air bearing lathe changes noticeably in the portion. This fact shows that we still have to improve not only such manufacturing conditions as tool radius, and the roughness of tool tips but also the surface finish machine environments especially vibrations.