著者

橋詰 賢一 山本 秀雄 伊佐 功 絹田 幸生 石川 勇 久米 信行 吉野 勝美

出版者

The Institute of Electrical Engineers of Japan

雑誌

電気学会論文誌C(電子・情報・システム部門誌) (ISSN:03854221)

巻号頁・発行日

vol.112, no.12, pp.828-834, 1992-12-20 (Released:2008-12-19)

参考文献数

6

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Polyamic acid thin film was electrodeposited on metal foil using the solution containing triethyl-ammonium salt of polyamic acid dissolved in mixed solvent of DMF and methanol. The polyamic acid thin film was continuously imidized to form polyimide dielectric thin film, on which polypyrrole was polymerized as another electrode. Characteristics of this polyimide thin film as a dielectric is similar to that of polyimide film formed by spin coating technique. Applying this method to etched aluminium foil, small size film capacitor which has large capacitance and excellent characteristics was proposed.