著者

田中 慶一

出版者

公益社団法人 精密工学会

雑誌

精密工学会誌 (ISSN:09120289)

巻号頁・発行日

vol.75, no.4, pp.501-508, 2009-04-05 (Released:2011-02-07)

参考文献数

7

被引用文献数

1 2

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At first, I explain some key points and difficulty of lithography tool design, issues that should be overcome during the development and requirements for stages in lithography tool in this paper. Then, I have ascertained a limit of static-pressure air bearing with differential pumping mechanism for vacuum application, for instance EUVL(Extreme Ultra Violet Lithography tool) by manufacturing so-called the “vacuum compatible” 1-axis air bearing and verifying the performance by comparing with equivalent model simulation. Finally, one of MAGLEV(MAGnetic LEVitated) stage concepts is proposed instead of common AIRLEV(AIR LEVitated) stage by seriously considering a high throughput for mass production. I simultaneously contribute 2nd paper, “Development of 6DOF Magnetic Levitation Stage for Lithography Tool -Proof Of Concept (Second Report)-“ which is a sequel to this paper.

著者

田中 慶一

出版者

日経BP社

雑誌

日経ビジネスassocie (ISSN:13472844)

巻号頁・発行日

vol.10, no.9, pp.129-131, 2011-06-07

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「地元の素材を使った串揚げで、他府県の方にも大阪の魅力を感じていただきたい」と、店主の畑島亮さんが昨年12月に開店。コース中心の串揚げメニューには、河内レンコンや水ナスなど近年注目を集める「なにわ伝統野菜」や、泉州の犬鳴ポークといった、地の食材が名を連ねる。