著者

斎藤 秀俊 砂山 英樹 田中 教雄 大塩 茂夫

出版者

公益社団法人日本セラミックス協会

雑誌

日本セラミックス協会学術論文誌 : Nippon Seramikkusu Kyokai gakujutsu ronbunshi (ISSN:18821022)

巻号頁・発行日

vol.106, no.1239, pp.1051-1055, 1998-11-01

被引用文献数

17 17

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Titanium dioxide films were chemically prepared on (001) single-crystal strontium titanate, SrTiO_3, using a vapor deposition apparatus operating under atmospheric pressure with titanium tetra-isopropoxide. At a substrate temperature of 400℃, titanium dioxide grew epitaxially with lateral growth of steps, as well as multinucleation was observed during the initial growth process, i.e., the so-called Stranski-Krastanov growth. As a result, the surface of strontium titanate was completely covered by titanium dioxide steps with an average lateral growth rate of 100 nm/s, followed by multinucleation growth. The nuclei developed in a number of highly oriented crystallites having well defined facets. X-ray diffractometry and transmission electron microscopy revealed that these crystallites consisted of <001>-oriented anatase-type structure.