著者

福澤 健二 寺田 諭 式田 光宏 雨川 洋章 張 賀東 三矢 保永

出版者

一般社団法人 日本機械学会

雑誌

日本機械学会論文集 C編 (ISSN:03875024)

巻号頁・発行日

vol.72, no.723, pp.3655-3664, 2006-11-25 (Released:2011-03-04)

参考文献数

11

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A novel micro-mechanical probe for friction force microscopy has been presented. The probe has a double cantilever that is supported by a torsion beam. It measures the lateral force by detecting the deflection of the double cantilever and measures the vertical force by the torsion of the torsion beam. It can measure the two forces independently without the mechanical crosstalk. The force resolution is of the order of 1 nN. The probe can clarify the micro/nanotribological phenomena more accurately than conventional cantilever probes and provide useful information for the identification of material properties.