著者

福澤 健二 寺田 諭 式田 光宏 雨川 洋章 張 賀東 三矢 保永

出版者

一般社団法人 日本機械学会

雑誌

日本機械学会論文集 C編 (ISSN:03875024)

巻号頁・発行日

vol.72, no.723, pp.3655-3664, 2006-11-25 (Released:2011-03-04)

参考文献数

11

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A novel micro-mechanical probe for friction force microscopy has been presented. The probe has a double cantilever that is supported by a torsion beam. It measures the lateral force by detecting the deflection of the double cantilever and measures the vertical force by the torsion of the torsion beam. It can measure the two forces independently without the mechanical crosstalk. The force resolution is of the order of 1 nN. The probe can clarify the micro/nanotribological phenomena more accurately than conventional cantilever probes and provide useful information for the identification of material properties.

著者

大岡 昌博 三矢 保永 竹内 修一 亀川 修

出版者

一般社団法人日本機械学会

雑誌

日本機械学會論文集. C編 (ISSN:03875024)

巻号頁・発行日

vol.62, no.598, pp.2250-2256, 1996-06-25

被引用文献数

7 10

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The present paper describes the implementation of and experiments on a three-axis tactile sensor applying an optical wave guide plate. The sensor is comprised of a sparse array of columnar feelers and a dense array of conical feelers, which are formed on opposite sides of a silicon rubber sheet. The columnar feelers contact objects while the conical feelers contact the acrylic optical waveguide plate. Three components of a force vector applied to the columnar feeler are identified from contact areas of four conical feelers which are covered by one columnar feeler. Contact points of conical feelers photographed using a CCD camera are transferred into a frame memory board installed in a personal computer and they are memorized as 8-bit patterns. A one-bit pattern is quantized from the 8-bit pattern by utilizing a suitable threshold value; the contact areas of conical feelers are obtained from the total number of picture cells of the one-bit pattern. In evaluation experiments, several combinations of vertical and horizontal forces are applied to the columnar feeler through a probe attached to a three-axis force sensor. The experimental results show that the three components of the force vector can be calculated from the four contact areas, and that hard material is not favorable for the conical feelers but is suitable for columnar feelers.