著者

佐野 義和 重田 陽子 市川 美千代 青木 裕光 梅田 卓也 上坂 渡 塚本 朗 千田 浩之 新添 真人

出版者

一般社団法人 映像情報メディア学会

雑誌

テレビジョン学会誌 (ISSN:03866831)

巻号頁・発行日

vol.50, no.2, pp.226-233, 1996-02-20 (Released:2011-03-14)

参考文献数

17

被引用文献数

1 2

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An on-chip inner-layer lens has been developed to improve the photo-sensitivity and smear of CCD image sensors. The inner-layer lens structure consists of a boron-phospho-silicate-glass (BPSG) layer and a heat melting transparent resin. The refractive indices for the inner-layer lens was higher than the BPSG layer and the planarization layer. Taking the incident angle into account, we have applied a new three dimentional simulation to the inner-layer lens to investigate the optical pass. We fabricate a 1/4-type IT-CCD image sensor with an inner-layer lens. This fabricated results of an image sensor has been explained well by the new three dimentional optical simulation. The increase of photo-sensitivity using the inner-layer lens technology is 16% without deterioration in the CCD characteristics. Furthermore using the inner-layer lens reduces the smear value by 70%.