著者

Yui Takaki Shirato Wataru Ohnishi Hiroshi Fujimoto Yoichi Hori Koichi Sakata Atsushi Hara

出版者

The Institute of Electrical Engineers of Japan

雑誌

IEEJ Journal of Industry Applications (ISSN:21871094)

巻号頁・発行日

pp.21005641, (Released:2021-12-24)

被引用文献数

2

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Manufacturing equipment often require high-speed and high-precision positioning with long strokes. This study aims to utilize pneumatic cylinders for such equipment owing to their several advantages. One of the challenges in pressure and position control is valve nonlinearity, such as a varying dead zone. While the conventional feedforward dead zone compensation method cannot address variations in valve input-output characteristics, the twin-drive system, a feedback compensation method, can address the variations using a fast-response flowmeter. However, the disadvantage of the twin-drive system is that it is likely to cause saturation and windup. To solve this problem, we propose an anti-windup method for the twin-drive system. Experimental results indicate the proposed method avoids windup and enables accurate tracking control in the difference mode (i.e., mass-flow input to the tank). Moreover, the experimental results reveal that the proposed twin-drive system with the anti-windup structure improves the pressure tracking performance and enhances the pressure control system's linearity compared with those of the conventional feedforward compensation method.

著者

Hiroshi Fujimoto Koichi Sakata

出版者

The Institute of Electrical Engineers of Japan

雑誌

IEEJ Journal of Industry Applications (ISSN:21871094)

巻号頁・発行日

vol.3, no.3, pp.270-276, 2014 (Released:2014-05-01)

参考文献数

17

被引用文献数

3 6

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Motion control techniques are employed for nanoscale positioning in industrial equipment such as numerical control (NC) machine tools and exposure systems. The advanced motion control techniques are based on precise current control. However, speeding up the precise current response causes a serious limitation owing to the carrier period of the inverter. In addition, the position response has to be slower than the current response. In a previous paper, we designed and fabricated an experimental precision stage, achieving novel ultrahigh-speed nanoscale positioning based on multirate pulse width modulation (PWM) control. However, it was difficult to achieve faster and more precise positioning because of the resonance modes of the stage. In this paper, we propose a multirate PWM control in which the resonance mode is considered. Simulations and experiments are performed to demonstrate the advantages of the proposed method.

著者

藤本 博 フジモト ヒロシ Hiroshi Fujimoto

出版者

立教大学アメリカ研究所

雑誌

立教アメリカン・スタディーズ = Rikkyo American studies (ISSN:13464825)

巻号頁・発行日

no.38, pp.25-40, 2016-03