著者
Viet-Ha Tran Takeshi Yatabe Takahiro Matsumoto Hidetaka Nakai Kazuharu Suzuki Takao Enomoto Seiji Ogo
出版者
(社)日本化学会
雑誌
Chemistry Letters (ISSN:03667022)
巻号頁・発行日
vol.44, no.6, pp.794-796, 2015-06-05 (Released:2015-06-05)
参考文献数
37

We report the first example of a Ni0 precursor that provides a contamination-free (<1%) nickel film by metal–organic chemical vapor deposition (MOCVD) using N2 as the carrier gas. The structure and physical properties of the Ni0 precursor and subsequent film are described.